Laser-Induced Growth of Titanium Nitride Microcolumns on Biased Titanium Targets

Substrate Effects on the APCVD Growth of Titanium Nitride Films

Direct synthesis of titanium nitride by laser-plasma

Thermal stability of a-titanium in contact with titanium nitride

The thermal stability of an a-Ti film in contact with a d-TiN film in the structure of a TiN/Ti/TiN film stack on SiO2 substrates was studied by in situ sheet resistance (Rs) measurement, Auger electron spectroscopy, glancing angle x-ray diffractometry, cross-sectional transmission electron microscopy, scanning electron microscopy, and atomic force microscopy. It was found that nitrogen dissolv...

Interface Investigations on Titanium Nitride Bilayer Systems

Nanocomposite coatings composed of two phases with atomically sharp phase boundaries, show interesting mechanical properties. These properties are often originating from their high interface to volume ratio. Composites of nanocrystalline titanium nitride (TiN) grains surrounded by a one to two monolayer thick interlayer of silicon nitride (Si3N4) show an enhanced nanohardness. The central theme...

Spectroscopic Characterization of Laser-induced Titanium Plume

A titanium target was ablated by a KrF excimer laser with fluences varying from 4 to 8 J/cm in an argon filled environment with pressures ranging from vacuum to 1 torr. The effects of laser fluence and background gas pressure on the kinetic energies of the ablated species were investigated by temporally and spatially resolved emission spectroscopy. The maximum surface temperatures were calculat...